MOEMS Vibration Sensor with Organic Semiconductor Readout
نویسندگان
چکیده
منابع مشابه
Strongly Passively Damped MOEMS Vibration Sensor
Usually, one favors a low resonance peak for vibration sensing, since this expands the measurement range. Furthermore, one wants to avoid ringing. Both requirements are met by a high damping, i.e. a low quality factor of Q ~ 1. In this contribution, we show that it is possible to design a micro-opto-electro-mechanical system (MOEMS) vibration sensor featuring a strong passive damping leading to...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2016
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2016.11.439